US Patent 12074008 Programmable plasma ignition profiles
Patent 12074008 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on August, 2024 by the United States Patent and Trademark Office.
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US Patent 12074008 Programmable plasma ignition profiles
Article
Patent abstract
Generators and methods for igniting a plasma in a plasma chamber are disclosed. The generator includes an ignition profile generator that includes a data interface configured to receive a specification for voltage as a function of time and an ignition data generator configured to create an ignition profile from the specification. The generator also includes an ignition profile datastore to store the ignition profile and a waveform generator configured to apply a waveform with the ignition profile to an output of the generator.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Daryl Frost0
John Accardo0
Mike Armstrong0
Date of Patent
August 27, 2024
0Patent Application Number
183186500
Date Filed
May 16, 2023
0Patent Citations
Patent Primary Examiner
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