Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sanjay Natarajan0
Michael Stolfi0
Myungsun Kim0
Benjamin Colombeau0
Date of Patent
August 13, 2024
0Patent Application Number
179680680
Date Filed
October 18, 2022
0Patent Citations
Patent Primary Examiner
Patent abstract
Horizontal gate-all-around devices and methods of manufacturing same are described. The hGAA devices comprise a trimmed semiconductor material between source regions and drain regions of the device. The method includes selectively isotropically etching semiconductor material layers between source regions and drain regions of an electronic device.
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