US Patent 12027821 Bonded tunable VCSEL with bi-directional actuation
Patent 12027821 was granted and assigned to Excelitas Technologies on July, 2024 by the United States Patent and Trademark Office.
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US Patent 12027821 Bonded tunable VCSEL with bi-directional actuation
Article
Patent abstract
A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
James W Getz0
Peter S. Whitney0
Date of Patent
July 2, 2024
0Patent Application Number
178522680
Date Filed
June 28, 2022
0Patent Citations
Patent Primary Examiner
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