US Patent 12027553 Photodetector with buried airgap reflectors
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US Patent 12027553 Photodetector with buried airgap reflectors
Article
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
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Patent Number
Patent Inventor Names
Alvin J. Joseph0
Siva P. Adusumilli0
Steven M. Shank0
Vibhor Jain0
Date of Patent
July 2, 2024
0Patent Application Number
178964010
Date Filed
August 26, 2022
0Patent Citations
Patent Primary Examiner
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