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US Patent 12014913 Reducing plasma formation in an ion pump

Patent 12014913 was granted and assigned to Edwards Vacuum on June, 2024 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
Edwards Vacuum
Edwards Vacuum
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Current Assignee
Edwards Vacuum
Edwards Vacuum
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
120149130
Patent Inventor Names
Evan Privet0
Marcus Hans Robert Thierley0
Date of Patent
June 18, 2024
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Patent Application Number
176406730
Date Filed
September 4, 2020
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Patent Citations
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US Patent 10629417 Sputter ion pump with penning-trap current sensor
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US Patent 11569077 Compact electrostatic ion pump
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Patent Primary Examiner
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Christopher S Bobish
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CPC Code
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H01J 17/24
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H01J 41/12
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H01J 17/22
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F04B 37/02
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Patent abstract

An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.

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