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US Patent 12007797 Flow rate control device and flow rate control method
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US Patent 12007797 Flow rate control device and flow rate control method
Article
Patent abstract
A flow rate control device
Infobox
Is a
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12007797
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Patent Inventor Names
Kaoru Hirata
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Katsuyuki Sugita
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Keisuke Ideguchi
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Kouji Nishino
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Naofumi Yasumoto
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Shinya Ogawa
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Date of Patent
June 11, 2024
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Patent Application Number
18346434
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Date Filed
July 3, 2023
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Patent Citations
US Patent 11125453 Calibration of an actuator
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US Patent 9328826 Fluid control valve and mass flow controller
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US Patent 9638560 Calibration method and flow rate measurement method for flow rate controller for gas supply device
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US Patent 10054534 Group calibration of environmental sensors
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US Patent 10704936 Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them
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US Patent 10883866 Pressure-based flow rate control device and malfunction detection method therefor
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US Patent 10884436 Flow rate signal correction method and flow rate control device employing same
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US Patent 10969259 Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
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US Patent 11262222 Fluid device and program for fluid device
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US Patent 11287297 Liquid micrometer with a set flow rate value
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Patent Primary Examiner
William M McCalister
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CPC Code
Y10T 137/7761
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G01F 1/363
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G05D 7/0635
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G05D 7/0623
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F16K 31/004
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G05B 15/02
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