Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
William A. Clark0
Erdinc Tatar0
Date of Patent
June 4, 2024
0Patent Application Number
172380510
Date Filed
April 22, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
Microelectromechanical systems (MEMS) capacitive strain gauge sensors are described. The strain gauge sensors include a lever configured to mechanically amplify a strain response. In some embodiments, an anchored beam is coupled to the effort arm of the lever and a movable sensing finger to the resistance arm. The effort arm may be shorter than the resistance arm, thus providing a mechanical amplification.
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