US Patent 11990321 Fast response pedestal assembly for selective preclean
Patent 11990321 was granted and assigned to Applied Materials on May, 2024 by the United States Patent and Trademark Office.
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US Patent 11990321 Fast response pedestal assembly for selective preclean
Article
Patent abstract
Implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. In one implementation, the substrate support pedestal assembly includes a shaft. The substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. The substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.
Infobox
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chaitanya A. Prasad0
Lara Hawrylchak0
Date of Patent
May 21, 2024
0Patent Application Number
179929950
Date Filed
November 23, 2022
0Patent Citations
Patent Primary Examiner
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