Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Samantha S. H. Tan0
Jun Xue0
Mary Anne Manumpil0
Da Li0
Jengyi Yu0
Date of Patent
May 21, 2024
0Patent Application Number
174523650
Date Filed
October 26, 2021
0Patent Citations
...
Patent Citations Received
Patent Primary Examiner
Patent abstract
This disclosure relates generally to a patterning structure including an underlayer and an imaging layer, as well as methods and apparatuses thereof. In particular embodiments, the underlayer provides an increase in radiation absorptivity and/or patterning performance of the imaging layer.
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