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US Patent 11988906 Waveguide structure

Patent 11988906 was granted and assigned to Taiwan Semiconductor Manufacturing Company on May, 2024 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
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Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
119889060
Patent Inventor Names
Chan-Hong Chern0
Date of Patent
May 21, 2024
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Patent Application Number
178733700
Date Filed
July 26, 2022
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Patent Citations
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US Patent 7116853 PN diode optical modulators fabricated in rib waveguides
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US Patent 9448425 Optical waveguide element and optical modulator
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US Patent 9564588 Device for detecting surface plasmon and polarization by using topological insulator, method of manufacturing the device, and method of detecting surface plasmon and polarization
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US Patent 10025120 Method and system for a low parasitic silicon high-speed phase modulator having raised fingers perpendicular to the PN junction
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Patent Primary Examiner
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Robert Tavlykaev
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CPC Code
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G02F 2201/063
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G02F 2203/50
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G02B 6/12
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G02B 2006/12097
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G02B 2006/12142
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G02F 1/225
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G02F 1/212
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G02F 1/025
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Patent abstract

An optical phase-shifting device includes a ribbed waveguide portion on an insulating layer, the waveguide portion having a p-n or p-i-n junction extending in a longitudinal direction and having a height. A pair of slab portions are disposed adjacent the waveguide portion, one on each side of the ribbed waveguide portion and on the insulation layer. The slab portion have higher doping concentrations than the respective doping concentrations in the ribbed waveguide portion. At least a portion of each slab portion has a height increasing with distance from the waveguide portion, with the slab height being smaller than that of the waveguide portion at the junction between the waveguide portion and slab portion. A pair of contact portions are formed adjacent the respective slab portion and further away from the waveguide portion. A portion of each contact portion can also have a height varying with distance from the waveguide portion.

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