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US Patent 11984295 Charged particle assessment tool, inspection method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
December 23, 2020
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Date of Patent
May 14, 2024
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Patent Application Number
17790713
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Patent Citations
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US Patent 8698094 Permanent magnet lens array
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US Patent 7880143 Electron beam apparatus
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US Patent 9869650 Pattern inspection apparatus
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US Patent 7332729 System and method for multiple electron, ion, and photon beam alignment
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US Patent 7569834 High resolution charged particle projection lens array using magnetic elements
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Patent Inventor Names
Marco Jan-Jaco Wieland
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11984295
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Patent Primary Examiner
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Sean M Luck
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CPC Code
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H01J 37/153
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H01J 37/20
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H01J 37/244
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H01J 37/265
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H01J 37/28
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H01J 37/3177
0
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H01J 2237/0453
0
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H01J 2237/1532
0
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H01J 2237/2817
0
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H01J 37/1474
0
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