US Patent 11961745 Wet bench structure
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Edits on 17 Apr, 2024
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US Patent 11961745 Wet bench structure
Article
Patent abstract
The present disclosure describes an apparatus for processing one or more objects. The apparatus includes a carrier configured to hold the one or more objects, a tank filled with a processing agent and configured to receive the carrier, and a spinning portion configured to contact the one or more objects and to spin the one or more objects to disturb a flow field of the processing agent.
Infobox
Is a
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chun-Chieh Mo0
Chung-Yu Lin0
Shih-Chi Kuo0
Date of Patent
April 16, 2024
0Patent Application Number
178669080
Date Filed
July 18, 2022
0Patent Citations
Patent Primary Examiner
CPC Code
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