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US Patent 11959806 MEMS sensors and systems

Patent 11959806 was granted and assigned to Obsidian Sensors, Inc. on April, 2024 by the United States Patent and Trademark Office.

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Patent abstract

Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems. In some embodiments, the MEMS devices and systems are used in imaging applications.

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