US Patent 11948981 Seam-filling of metal gates with Si-containing layers
Is a
Date Filed
August 18, 2021
0
Date of Patent
April 2, 2024
0
Patent Application Number
17405406
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Patent Inventor Names
Weng Chang
0
Chi On Chui
0
Hsin-Yi Lee
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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