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US Patent 11935773 Calibration jig and calibration method

Patent 11935773 was granted and assigned to Applied Materials on March, 2024 by the United States Patent and Trademark Office.

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 US Patent 11935773 Calibration jig and calibration method

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Patent abstract

Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
119357730
Patent Inventor Names
Andrew Myles0
Denis M. Koosau0
Peter Muraoka0
Phillip A. Criminale0
Date of Patent
March 19, 2024
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Patent Application Number
164075200
Date Filed
May 9, 2019
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Patent Citations
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US Patent 6896765 Method and apparatus for the compensation of edge ring wear in a plasma processing chamber
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Patent Primary Examiner
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Jason Berman
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