Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasunori Kawanabe0
Yoshihiro Okawa0
Date of Patent
March 5, 2024
0Patent Application Number
170446690
Date Filed
April 24, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
An electrostatic chuck includes an insulating base body including a predetermined surface, and an electrode inside the base body, which is layer shaped along the predetermined surface. An upper surface of the electrode facing a side where the predetermined surface is located and the base body are in contact. A gap which is rendered a vacuum or filled with a gas is interposed between a side surface of the electrode and the base body.
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