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US Patent 11913874 Optical metrology tool equipped with modulated illumination sources

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
April 5, 2021
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Date of Patent
February 27, 2024
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Patent Application Number
17222330
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Patent Citations
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US Patent 7435982 Laser-driven light source
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US Patent 7567351 High resolution monitoring of CD variations
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US Patent 7786455 Laser-driven light source
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US Patent 8441639 Metrology systems and methods
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US Patent 8896832 Discrete polarization scatterometry
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US Patent 8666202 System and method for measuring properties of a thin film coated glass
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US Patent 9400246 Optical metrology tool equipped with modulated illumination sources
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US Patent 6914675 Ellipsometric method and control device for making a thin-layered component
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US Patent 7357513 System and method for driving semiconductor laser sources for displays
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Patent Inventor Names
David Y. Wang
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Kevin Peterlinz
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Andrei Veldman
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Andrei V. Shchegrov
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Gregory Brady
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Derrick A. Shaughnessy
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Lawrence D. Rotter
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11913874
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Patent Primary Examiner
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Sunghee Y Gray
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CPC Code
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G03F 7/70633
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G03F 7/70625
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G03F 7/70608
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G01N 21/55
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G01N 21/4738
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G01N 21/211
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G01N 2021/213
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G01B 11/0616
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