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US Patent 11869872 Chip stack packaging structure and chip stack packaging method

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
118698721
Patent Inventor Names
Yao Wang1
Yinhua Cui1
Wei Zhao1
Yunzhi Ling1
Zhitao Chen1
Zibai Li1
Chuan Hu1
Date of Patent
January 9, 2024
1
Patent Application Number
176340811
Date Filed
August 5, 2021
1
Patent Citations
‌
US Patent 7901989 Reconstituted wafer level stacking
1
Patent Primary Examiner
‌
Niki H Nguyen
1
CPC Code
‌
H01L 2924/01029
1
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H01L 2924/01078
1
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H01L 2224/73265
1
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H01L 25/50
1
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H01L 2924/01005
1
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H01L 2224/73204
1
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H01L 2224/0401
1
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H01L 23/481
1
...
Patent abstract

A chip stack packaging structure and method includes: a base chip layer, including a base chip with pins on the front surface; at least one stacked chip layer, which is formed on the base chip layer, has an inter-chip insulating layer and at least one stacked chip attached to the insulating layer and pins on the front surface, where the front surface of the stacked chip faces the front surface of the base chip; and a top insulating layer, stacked on the stacked chip layer farthest from the base chip layer. A vertical interconnection hole is formed inside the inter-chip insulating layer to allow the corresponding pins to be communicated vertically so as to be electrically connected. Inside the vertical interconnection hole, a conductive material layer is formed that makes the corresponding pins electrically connected; the stacked chip is thinned and reduced after being attached to the inter-chip insulating layer.

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