US Patent 11867307 Multi-piece slit valve gate
Patent 11867307 was granted and assigned to Applied Materials on January, 2024 by the United States Patent and Trademark Office.
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US Patent 11867307 Multi-piece slit valve gate
Article
Patent abstract
Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The slit valve gate further includes a clamp portion coupled to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hannie Thi Vo0
Ofer Amir0
Peter Reimer0
Shawn Thanhson Le0
Date of Patent
January 9, 2024
0Patent Application Number
178760350
Date Filed
July 28, 2022
0Patent Citations
Patent Primary Examiner
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