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US Patent 11862922 Light emitting sealed body and light source device

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
December 21, 2020
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Date of Patent
January 2, 2024
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Patent Application Number
17129750
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Patent Citations
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US Patent 8921814 Photon source, metrology apparatus, lithographic system and device manufacturing method
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US Patent 9741553 Elliptical and dual parabolic laser driven sealed beam lamps
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US Patent 9748086 Laser driven sealed beam lamp
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US Patent 9814126 Photon source, metrology apparatus, lithographic system and device manufacturing method
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US Patent 9824879 Light source device
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US Patent 9913357 Radiation source, metrology apparatus, lithographic system and device manufacturing method
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US Patent 9922814 Apparatus and a method for operating a sealed beam lamp containing an ionizable medium
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US Patent 9924585 Radiation source, metrology apparatus, lithographic system and device manufacturing method
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US Patent 9984865 Light-emitting sealed body
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US Patent 10032622 Light source device
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•••
Patent Inventor Names
Akinori Asai
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Shinichi Ohba
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Toru Fujita
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Akio Suzuki
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Yusei Nagata
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Ron Collins
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Laura Owens
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Matthew Partlow
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Stephen F. Horne
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Takayuki Ohshiro
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11862922
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Patent Primary Examiner
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Joshua King
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CPC Code
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H05G 2/008
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H01J 61/302
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H01S 3/0323
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H01S 3/0326
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