Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Phillip W. Carter0
Steven Kraft0
Andrew R. Wolff0
Date of Patent
December 26, 2023
0Patent Application Number
156493780
Date Filed
July 13, 2017
0Patent Citations
Patent Primary Examiner
Patent abstract
The invention provides a chemical-mechanical polishing composition comprising (a) an abrasive, (b) a cobalt accelerator, and (c) an oxidizing agent that oxidizes a metal, wherein the polishing composition has a pH of about 4 to about 10. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.
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