US Patent 11835868 Protective coating for electrostatic chucks
Patent 11835868 was granted and assigned to Lam Research on December, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 7, 2021
0
Date of Patent
December 5, 2023
0
Patent Applicant
Patent Application Number
17369694
0
Patent Citations
•••
Patent Inventor Names
Vincent Burkhart
0
Stephen Topping
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 11835868 Protective coating for electrostatic chucks
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.