US Patent 11804363 Chamber components for gas delivery modulation
Patent 11804363 was granted and assigned to Applied Materials on October, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 4, 2020
Date of Patent
October 31, 2023
Patent Applicant
Patent Application Number
17088834
Patent Citations
Patent Inventor Names
Sherry L. Mings
Venkata Sharat Chandra Parimi
Diwakar Kedlaya
Mingle Tong
Truong Van Nguyen
Fang Ruan
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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