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US Patent 11802134 Organometallic compound and method
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Is a
Patent
Date Filed
February 10, 2017
Date of Patent
October 31, 2023
Patent Application Number
16076208
Patent Citations
US Patent 8278224 Flowable oxide deposition using rapid delivery of process gases
Patent Inventor Names
Shaun Cembella
Cunhai Dong
Rajesh Odedra
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11802134
Patent Primary Examiner
Mandy C Louie
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