Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Woo Yong Sung
Seungyong Song
Junghan Seo
Sanggab Kim
Date of Patent
October 17, 2023
Patent Application Number
17450178
Date Filed
October 7, 2021
Patent Citations
Patent Primary Examiner
Patent abstract
A manufacturing method includes preparing a substrate, forming at least one groove in the substrate, forming an oxidation resistant film on an inner wall of the groove, and forming a first inorganic layer on the substrate and the oxidation resistant film is formed between the substrate and the first inorganic layer.
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