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US Patent 11781210 Magnet assembly and deposition apparatus including the same

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Contents

Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11781210
Patent Inventor Names
Jae Min Hong
Jong Hyoek Ryu
Seung Min Jin
Date of Patent
October 10, 2023
Patent Application Number
17513203
Date Filed
October 28, 2021
Patent Citations
‌
US Patent 9045818 Shadow mask held magnetically on a substrate support
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US Patent 9478337 Magnet plate
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US Patent 9524891 Apparatus for fixing metal mask
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US Patent 9583245 Magnet plate assembly, deposition apparatus including the magnet plate assembly, and deposition method using the magnet plate assembly
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US Patent 9666346 Magnet plate assembly, deposition apparatus including the same, and method of deposition using the same
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US Patent 9773600 Magnet plate assembly, deposition apparatus including the same, and deposition method using the same
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US Patent 9959961 Permanent magnetic chuck for OLED mask chucking
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US Patent 10053766 Mask frame assembly and method of manufacturing the same
...
Patent Primary Examiner
‌
Jethro M. Pence
Patent abstract

A magnet assembly includes a support plate and a plurality of magnets which are removably fixed to the support plate and applies a magnetic force to a deposition mask. Each magnet among the plurality of magnets include a first surface facing the support plate, a second surface opposite to the first surface and facing the deposition mask, and a magnet groove defined therein.

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