Patent attributes
A measurement device includes: a resistance measurement unit that measures an electrical resistance of a measurement target; a first measurement unit, including a detector that detects information indicating a first physical property other than the electrical resistance of the measurement target, that measures the first physical property from a detection result from the detector; a second measurement unit, including a detector that detects information indicating a second physical property other than the electrical resistance and the first physical property of the measurement target, that measures the second physical property from a detection result from the detector, in which a length of time from a start of driving the detector until a start of actual measurement is longer in the second measurement unit than in the first measurement unit; and a control unit that performs first control causing the first measurement unit to execute a measurement operation of measuring the first physical property in parallel with a measurement operation by the resistance measurement unit, and performs second control causing the second measurement unit to execute a measurement operation of measuring the second physical property in parallel with the measurement operation by the resistance measurement unit and also causing the second measurement unit to start the driving of the detector in the second measurement unit before the start of the driving of the detector in the first measurement unit.
