Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bart Dinand Paarhuis
Daan Daniel Johannes Antonius Van Sommeren
Maarten Holtrust
Güneş Nak{dot over (i)}boğlu
Martinus Van Duijnhoven
Frank Johannes Jacobus Van Boxtel
Francis Fahrni
Anne Willemijn Bertine Quist
Date of Patent
September 19, 2023
Patent Application Number
15570934
Date Filed
March 29, 2016
Patent Citations
Patent Primary Examiner
Patent abstract
A lithographic apparatus has: a conduit through which a gas can flow; a gas mover configured to cause the gas to flow in the conduit; a wall in contact with the gas in the conduit and defining a membrane aperture therein; and an acoustic filter including a flexible membrane fixed in the membrane aperture. The acoustic filter reduces transmission of acoustic disturbances without adding any flow resistance.
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