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US Patent 11761094 Protection of components from corrosion

Patent 11761094 was granted and assigned to Applied Materials on September, 2023 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
Applied Materials
Applied Materials
Date Filed
May 6, 2021
Date of Patent
September 19, 2023
Patent Applicant
Applied Materials
Applied Materials
Patent Application Number
17313847
Patent Citations
‌
US Patent 7262133 Enhancement of copper line reliability using thin ALD tan film to cap the copper line
‌
US Patent 7264846 Ruthenium layer formation for copper film deposition
‌
US Patent 7265048 Reduction of copper dewetting by transition metal deposition
‌
US Patent 7279432 System and method for forming an integrated barrier layer
‌
US Patent 7285312 Atomic layer deposition for turbine components
‌
US Patent 7317229 Gate electrode structures and methods of manufacture
‌
US Patent 7371467 Process chamber component having electroplated yttrium containing coating
‌
US Patent 7396565 Multiple precursor cyclical deposition system
‌
US Patent 7404985 Noble metal layer formation for copper film deposition
‌
US Patent 7405158 Methods for depositing tungsten layers employing atomic layer deposition techniques
•••
Patent Inventor Names
David Britz
Yuriy Melnik
Pravin K. Narwankar
David Thompson
Sukti Chatterjee
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11761094
Patent Primary Examiner
‌
Z. Jim Yang
CPC Code
‌
C23C 28/048
‌
C23C 28/30
‌
C23C 28/345
‌
C23C 28/3455
‌
C23C 28/36
‌
G01J 5/0088
‌
G01N 21/8422
‌
G01M 15/14
‌
F05D 2300/6111
‌
F05D 2300/611
•••

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