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US Patent 11760059 Method of room temperature covalent bonding
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Patent
Date Filed
July 24, 2019
Date of Patent
September 19, 2023
Patent Application Number
16521493
Patent Citations
US Patent 9299736 Hybrid bonding with uniform pattern density
US Patent 9620481 Substrate bonding with diffusion barrier structures
US Patent 9656852 CMOS-MEMS device structure, bonding mesa structure and associated method
US Patent 9723716 Contact pad structure, an electronic component, and a method for manufacturing a contact pad structure
US Patent 9728521 Hybrid bond using a copper alloy for yield improvement
US Patent 9741620 Structures and methods for reliable packages
US Patent 9799587 Semiconductor device
US Patent 9852988 Increased contact alignment tolerance for direct bonding
US Patent 9881882 Semiconductor package with three-dimensional antenna
US Patent 9893004 Semiconductor interposer integration
•••
Patent Inventor Names
Qin-Yi Tong
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11760059
Patent Primary Examiner
Philip C. Tucker
CPC Code
H01L 2224/80895
H01L 2924/05442
H01L 2924/3512
H01L 21/3105
H01L 21/76251
H01L 2224/0401
H01L 2224/08059
H01L 2224/81894
H01L 2224/8319
H01L 2224/8385
•••
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