US Patent 11752515 Coating apparatus and coating method
Patent 11752515 was granted and assigned to Tokyo Electron on September, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 10, 2020
Date of Patent
September 12, 2023
Patent Applicant
Patent Application Number
16897922
Patent Citations
•••
Patent Citations Received
Patent Inventor Names
Tohru Azuma
Shinichiro Yamanaka
Naruaki Iida
Hideki Kajiwara
Yuya Yonemitsu
Kohei Kawakami
Shinichi Mizushino
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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