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US Patent 11751468 Controlled deposition of materials using a differential pressure regime

Patent 11751468 was granted and assigned to Universal Display Corporation on September, 2023 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

Universal Display Corporation

Current Assignee

Universal Display Corporation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Siddharth Harikrishna Mohan

Xin Xu

Gregory McGraw

William E. Quinn

Date of Patent

September 5, 2023

Patent Application Number

17380169

Date Filed

July 20, 2021

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Patent Primary Examiner

CPC Code

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Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

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