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US Patent 11749772 Photodetector, manufacturing method thereof, and lidar system

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Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11749772
Patent Inventor Names
Yanwei Yang
Yan Zou
Hongliang Liu
Date of Patent
September 5, 2023
Patent Application Number
17288003
Date Filed
October 16, 2019
Patent Citations
‌
US Patent 10007001 Active short-wave infrared four-dimensional camera
Patent Primary Examiner
‌
Sitaramarao S Yechuri
CPC Code
‌
H01L 31/1844
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H01L 31/02161
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H01L 31/1075
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G01S 17/02
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H01L 31/035272
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H01L 31/03046
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H01L 31/022408
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H01L 31/107

Provided are a photodetector, a manufacturing method thereof, and a lidar system. A photosensitive region of the photodetector is circular and has a diameter range of 100-300 μm. Compared with a conventional photodetector having a photosensitive region with a diameter of 50 μm, the photodetector of the present invention can have a detection range greater than 200 m, responsivity greater than 20 A/W and a dark current less than 10 nA.

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