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US Patent 11749315 3D DRAM structure with high mobility channel

Patent 11749315 was granted and assigned to Applied Materials on September, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Applied Materials
Applied Materials
Current Assignee
Applied Materials
Applied Materials
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11749315
Patent Inventor Names
Gill Yong Lee
Chang Seok Kang
Lequn Liu
Tomohiko Kitajima
Sung-Kwan Kang
Sanjay Natarajan
Date of Patent
September 5, 2023
Patent Application Number
17551538
Date Filed
December 15, 2021
Patent Citations
‌
US Patent 10825815 Memory arrays
‌
US Patent 7595262 Manufacturing method for an integrated semiconductor structure
‌
US Patent 7649763 Nonvolatile ferroelectric memory
‌
US Patent 10607995 Memory arrays
‌
US Patent 10804273 Memory arrays comprising vertically-alternating tiers of insulative material and memory cells and methods of forming a memory array
‌
US Patent 11295786 3D dram structure with high mobility channel
Patent Primary Examiner
‌
Jose R Diaz
CPC Code
‌
G11C 5/063
‌
H01L 21/02672
‌
H01L 21/02667
‌
H01L 27/1285
‌
H01L 27/127
‌
H01L 27/1277

Memory devices are described. The memory devices include a plurality of bit lines extending through a stack of alternating memory layers and dielectric layers. Each of the memory layers comprises a single crystalline-like silicon layer and includes a first word line, a second word line, a first capacitor, and a second capacitor. Methods of forming stacked memory devices are also described.

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