Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ashutosh Agarwal
Sanjeev Baluja
Date of Patent
September 5, 2023
Patent Application Number
17948323
Date Filed
September 20, 2022
Patent Citations
...
Patent Primary Examiner
Gas distribution apparatus, processing chambers and methods using a dead volume-free valve are described. The valve has a first inlet line with upstream and downstream ends and a second inlet line with a downstream end that connects to the first inlet line. A sealing surface at the downstream end of the second inlet line separates the first inlet line from the second inlet line preventing fluid communication between the first inlet line and the second inlet line.
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