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US Patent 11716847 Three-dimensional NAND memory device with split gates

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Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
117168471
Date of Patent
August 1, 2023
1
Patent Application Number
171136241
Date Filed
December 7, 2020
1
Patent Citations
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US Patent 9754963 Multi-tier memory stack structure containing two types of support pillar structures
1
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US Patent 9853050 Semiconductor memory device and method for manufacturing the same
1
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US Patent 10068917 Vertical memory devices and methods of manufacturing the same
1
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US Patent 10090318 Vertical string of memory cells individually comprising a programmable charge storage transistor comprising a control gate and a charge storage structure and method of forming a vertical string of memory cells individually comprising a programmable charge storage transistor comprising a control gate and a charge storage structure
1
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US Patent 10103165 Memory device
1
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US Patent 10497711 Non-volatile memory with reduced program speed variation
1
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US Patent 10276583 Three-dimensional memory device containing composite word lines including a metal silicide and an elemental metal and method of making thereof
1
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US Patent 10566346 Vertical-type memory device
1
...
Patent Primary Examiner
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Mary A Wilczewski
1
CPC Code
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H01L 27/11529
1
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H01L 23/5226
1
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H01L 29/40117
1
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H01L 29/4234
1
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G11C 16/0483
1
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H01L 27/11524
1

A semiconductor device is provided. The semiconductor device includes word line layers and insulating layers that are alternatingly stacked along a vertical direction perpendicular to a substrate of the semiconductor device. The semiconductor device includes a channel structure that extends along the vertical direction through the word line layers and the insulating layers. A cross-section of the channel structure that is perpendicular to the vertical axis includes channel layer sections that are spaced apart from one another.

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