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US Patent 11710718 Structures and methods for low temperature bonding using nanoparticles

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Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
117107180
Date of Patent
July 25, 2023
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Patent Application Number
171405190
Date Filed
January 4, 2021
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Patent Citations
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US Patent 10515913 Multi-metal contact structure
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US Patent 11264357 Mixed exposure for large die
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US Patent 11276676 Stacked devices and methods of fabrication
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US Patent 11329034 Direct-bonded LED structure contacts and substrate contacts
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US Patent 11348898 Systems and methods for releveled bump planes for chiplets
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US Patent 11355443 Dielets on flexible and stretchable packaging for microelectronics
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US Patent 7105980 Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics
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US Patent 7109063 Semiconductor substrate for build-up packages
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...
Patent Citations Received
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US Patent 11973056 Methods for low temperature bonding using nanoparticles
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US Patent 12027487 Structures for low temperature bonding using nanoparticles
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Patent Primary Examiner
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Benjamin P Sandvik
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A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

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