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US Patent 11705686 Acousto-optic system having phase-shifting reflector

Overview Structured Data Issues Contributors Activity

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Date Filed

September 20, 2018

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Date of Patent

July 18, 2023

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Patent Applicant

Electro Scientific Industries

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Patent Application Number

16636605

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Patent Citations

US Patent 7279721 Dual wavelength thermal flux laser anneal

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US Patent 8339574 Lithographic apparatus and device manufacturing method

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US Patent 9036247 Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use

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US Patent 7355722 Catoptric and catadioptric imaging systems with adaptive catoptric surfaces

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US Patent 7667888 Low cost system and method that implements acousto-optic (AO) RF signal excitation

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

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Patent Primary Examiner

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CPC Code

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