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US Patent 11699611 Forming mesas on an electrostatic chuck

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Date Filed
February 23, 2021
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Date of Patent
July 11, 2023
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Patent Applicant
Applied Materials
Applied Materials
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Patent Application Number
17183179
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Patent Citations
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US Patent 10679885 Substrate support assembly with deposited surface features
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US Patent 10654147 Polishing of electrostatic substrate support geometries
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US Patent 7944677 Electrostatic chuck
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US Patent 8390980 Electrostatic chuck assembly
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US Patent 9001489 Electrostatic chuck AlN dielectric repair
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US Patent 9669653 Electrostatic chuck refurbishment
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US Patent 10074552 Method of manufacturing electrostatic chuck having dot structure on surface thereof
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11699611
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Patent Primary Examiner
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Scott Bauer
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CPC Code
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H01L 21/6833
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C23C 16/0227
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