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US Patent 11699602 Substrate support assemblies and components

Overview Structured Data Issues Contributors

Is a

1

Current Assignee

Applied Materials

1

Date Filed

July 7, 2020

1

Date of Patent

July 11, 2023

1

Patent Applicant

Applied Materials

1

Patent Application Number

16922404

1

Patent Citations

US Patent 10177024 High temperature substrate pedestal module and components thereof

1

US Patent 8071920 Planar heater

1

US Patent 9245744 Combinatorial plasma enhanced deposition and etch techniques

1

US Patent 10704142 Quick disconnect resistance temperature detector assembly for rotating pedestal

1

Patent Jurisdiction

United States Patent and Trademark Office

1

Patent Number

1

Patent Primary Examiner

Mohammed Shamsuzzaman

1

CPC Code

1

1

1

1

1

1

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