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US Patent 11688580 Apparatus of plural charged-particle beams
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Is a
Patent
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Date Filed
June 21, 2021
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Date of Patent
June 27, 2023
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Patent Application Number
17353790
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Patent Citations
US Patent 7880143 Electron beam apparatus
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US Patent 8294095 Apparatus of plural charged particle beams with multi-axis magnetic lens
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US Patent 8378299 Twin beam charged particle column and method of operating thereof
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US Patent 8610055 Mass spectrometer ion trap having asymmetric end cap apertures
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US Patent 9035249 Multi-beam system for high throughput EBI
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US Patent 9153413 Multi-beam scanning electron beam device and methods of using the same
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US Patent 9607805 Apparatus of plural charged-particle beams
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US Patent 10109456 Apparatus of plural charged-particle beams
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US Patent 10573487 Apparatus of plural charged-particle beams
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US Patent 10115559 Apparatus of plural charged-particle beams
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•••
Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11688580
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Patent Primary Examiner
David E Smith
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CPC Code
H01J 2237/061
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H01J 2237/083
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H01J 2237/1532
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H01J 2237/1534
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H01J 2237/2817
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H01J 37/04
0
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