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US Patent 11686581 Stress-relief MEMS gyroscope

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Current Assignee
Analog Devices
Analog Devices
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Date Filed
June 7, 2021
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Date of Patent
June 27, 2023
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Patent Applicant
Analog Devices
Analog Devices
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Patent Application Number
17340859
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Patent Citations
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US Patent 7284429 Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer
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US Patent 7313958 Rotational rate sensor
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US Patent 7421897 Cross-quad and vertically coupled inertial sensors
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US Patent 7675217 Mechanical oscillator formed by a network of basic oscillators
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US Patent 8011245 Sensing element of coriolis force gyroscope
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US Patent 8061201 Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
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US Patent 8096181 Inertial sensor
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US Patent 8205498 Multi-axis capacitive accelerometer
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US Patent 8266961 Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies
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US Patent 8322213 Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11686581
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Patent Primary Examiner
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David J Bolduc
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CPC Code
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G01C 19/5712
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