Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 11682558 Fabrication of back-end-of-line interconnects

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
September 22, 2021
0
Date of Patent
June 20, 2023
0
Patent Application Number
17481981
0
Patent Citations
‌
US Patent 9786503 Method for increasing pattern density in self-aligned patterning schemes without using hard masks
0
‌
US Patent 9799534 Application of titanium-oxide as a patterning hardmask
0
‌
US Patent 9934970 Self aligned pattern formation post spacer etchback in tight pitch configurations
0
‌
US Patent 10163633 Non-mandrel cut formation
0
‌
US Patent 10256320 Vertical field-effect-transistors having a silicon oxide layer with controlled thickness
0
‌
US Patent 10249496 Narrowed feature formation during a double patterning process
0
‌
US Patent 10354873 Organic mandrel protection process
0
‌
US Patent 9748110 Method and system for selective spacer etch for multi-patterning schemes
0
‌
US Patent 9773676 Lithography using high selectivity spacers for pitch reduction
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
11682558
0
Patent Primary Examiner
‌
Shamim Ahmed
0

Find more entities like US Patent 11682558 Fabrication of back-end-of-line interconnects

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.