Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 20, 2023
0Patent Application Number
173392480
Date Filed
June 4, 2021
0Patent Citations
...
Patent Primary Examiner
A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y
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