Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 6, 2023
0Patent Application Number
176928590
Date Filed
March 11, 2022
0Patent Citations
...
Patent Primary Examiner
A lithographic apparatus with a cover plate formed separately from a substrate table and means for stabilizing a temperature of the substrate table by controlling the temperature of the cover plate is disclosed. A lithographic apparatus with thermal insulation provided between a cover plate and a substrate table so that the cover plate acts as a thermal shield for the substrate table is disclosed. A lithographic apparatus comprising means to determine a substrate table distortion and improve position control of a substrate by reference to the substrate table distortion is disclosed.
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