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US Patent 11667575 Erosion resistant metal oxide coatings

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Date Filed
July 18, 2018
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Date of Patent
June 6, 2023
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Patent Applicant
Applied Materials
Applied Materials
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Patent Application Number
16039005
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Patent Citations
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US Patent 7968205 Corrosion resistant multilayer member
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US Patent 8399862 Ion implanting apparatus and ion implanting method
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US Patent 8858745 Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
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US Patent 8916021 Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
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US Patent 9012030 Process chamber component having yttrium—aluminum coating
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US Patent 9090046 Ceramic coated article and process for applying ceramic coating
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US Patent 9343289 Chemistry compatible coating material for advanced device on-wafer particle performance
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US Patent 9394615 Plasma resistant ceramic coated conductive article
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US Patent 9440886 Rare-earth oxide based monolithic chamber material
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US Patent 9633884 Performance enhancement of coating packaged ESC for semiconductor apparatus
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11667575
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Patent Primary Examiner
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Karl E Group
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CPC Code
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C04B 35/505
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C04B 2235/3225
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C04B 2235/3248
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C04B 35/48
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C07F 5/00
0
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C07F 7/00
0
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C09D 1/00
0
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C04B 35/50
0

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