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US Patent 11657980 Dielectric fluid variable capacitor

Patent 11657980 was granted and assigned to COMET Technologies USA, Inc. on May, 2023 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
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COMET Technologies USA, Inc.
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Current Assignee
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COMET Technologies USA, Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116579800
Date of Patent
May 23, 2023
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Patent Application Number
177395950
Date Filed
May 9, 2022
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Patent Citations
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US Patent 8169162 Abnormal discharge suppressing device for vacuum apparatus
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US Patent 8203372 Synchronous rectifier post regulator
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US Patent 8222822 Inductively-coupled plasma device
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US Patent 8421377 Protecting high-frequency amplifers
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US Patent 8466622 High frequency power supply
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US Patent 8471746 Digital-to-analog conversion with combined pulse modulators
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US Patent 8803424 RF/VHF impedance matching, 4 quadrant, dual directional coupler with V
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US Patent 8884180 Over-voltage protection during arc recovery for plasma-chamber power supplies
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...
Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
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Patent Primary Examiner
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Eric W Thomas
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CPC Code
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H01G 5/16
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H01G 5/10
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H01G 5/38
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H01G 5/14
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A variable capacitor includes an enclosure having first and second conductive collars separated by an intermediate electrically insulating element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a fixed capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure for advancing and retracting the movable capacitor plate assembly relative to the fixed capacitor plate assembly. A hermetically sealed volume within the enclosure contains a dielectric fluid serving as a dielectric between a capacitor plate of the movable capacitor plate assembly and a capacitor plate of the fixed capacitor plate assembly. A flexible structure is provided to contain the dielectric fluid displaced when the movable capacitor plate assembly is advanced toward the fixed capacitor plate assembly.

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