Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xin Song0
Mohammad Mohammadi0
Vahid Naderyan0
Date of Patent
May 16, 2023
0Patent Application Number
173850840
Date Filed
July 26, 2021
0Patent Citations
...
Patent Primary Examiner
A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm. A plurality of pillars connects the first and second diaphragms, wherein the plurality of pillars has a higher distribution density at a geometric center of the MEMS diaphragm assembly than at an outer periphery thereof.
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