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US Patent 11631806 Method of integration of a magnetoresistive structure

Patent 11631806 was granted and assigned to Everspin Technologies on April, 2023 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
Everspin Technologies
Everspin Technologies
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Current Assignee
Everspin Technologies
Everspin Technologies
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116318060
Patent Inventor Names
Sanjeev Aggarwal0
Moazzem Hossain0
Kerry Joseph Nagel0
Kenneth Smith0
Date of Patent
April 18, 2023
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Patent Application Number
173170610
Date Filed
May 11, 2021
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Patent Citations
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US Patent 10164176 Method of integration of a magnetoresistive structure
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US Patent 11031546 Method of integration of a magnetoresistive structure
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Patent Primary Examiner
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Eric A. Ward
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CPC Code
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H01L 43/12
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G11C 11/16
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H01L 27/226
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H01L 27/228
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H01L 27/224
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H01L 27/222
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H01L 27/22
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H01L 43/08
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A method of manufacturing one or more interconnects to magnetoresistive structure comprising (i) depositing a first conductive material in a via; (2) etching the first conductive material wherein, after etching the first conductive material a portion of the first conductive material remains in the via, (3) partially filling the via by depositing a second conductive material in the via and directly on the first conductive material in the via; (4) depositing a first electrode material in the via and directly on the second conductive material in the via; (5) polishing a first surface of the first electrode material wherein, after polishing, the first electrode material is (i) on the second conductive material in the via and (ii) over the portion of the first conductive material remaining in the via; and (6) forming a magnetoresistive structure over the first electrode material.

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