US Patent 11610799 Electrostatic chuck having a heating and chucking capabilities
Patent 11610799 was granted and assigned to Applied Materials on March, 2023 by the United States Patent and Trademark Office.
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US Patent 11610799 Electrostatic chuck having a heating and chucking capabilities
In one example, an electrostatic chuck comprises a chuck body having a top surface configured to support a substrate and a bottom surface opposite the top surface. The chuck body comprises one or more chucking electrodes, and one or more heating elements. The chuck body further comprises first terminals disposed on the bottom surface of the chuck body and coupled with the one or more heating elements, second terminals disposed on the bottom surface of the chuck body and coupled with the one or more chucking electrodes, and third terminals disposed on the bottom first surface of the chuck body and coupled with the one or more chucking electrodes.
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